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Semiconductor 300mm Wafer Handling

ASYST TECHNOLOGIES JAPAN's semiconductor 300mm AMHS (Automated Material Handling System), which proudly leads the world in delivery performance, is fully equipped with the transportation devices that are necessary for semiconductor fabs and is an excellent fusion system that is made possible by its developmental potency, software, technology, and system integration ability. This system achieves high handling volume, high speed handling, QTAT, and cost reduction that are desired for advanced semiconductor fabs.

OHS (Over Head Shuttle)
OHS (Over Head Shuttle)
OHT (Overhead Hoist Transport)
OHT (Overhead Hoist Transport)
AGV (Automated Guided Vehicle)
AGV (Automated Guided Vehicle)
Stocker
Stocker
RGV (Rail Guided Vehicle)
RGV (Rail Guided Vehicle)
FasTrack
FasTrack

Experience you can trust

The semi-conductor 300mm wafer handling systems delivered to worldwide market

No.1 Market Share worldwide

Semiconductor 300mm AMHS delivery performance

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